JPH0419794Y2 - - Google Patents
Info
- Publication number
- JPH0419794Y2 JPH0419794Y2 JP11625790U JP11625790U JPH0419794Y2 JP H0419794 Y2 JPH0419794 Y2 JP H0419794Y2 JP 11625790 U JP11625790 U JP 11625790U JP 11625790 U JP11625790 U JP 11625790U JP H0419794 Y2 JPH0419794 Y2 JP H0419794Y2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- tank
- stopper
- wafer
- support rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005530 etching Methods 0.000 claims description 56
- 235000012431 wafers Nutrition 0.000 claims description 31
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 13
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11625790U JPH0419794Y2 (en]) | 1990-11-07 | 1990-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11625790U JPH0419794Y2 (en]) | 1990-11-07 | 1990-11-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0373437U JPH0373437U (en]) | 1991-07-24 |
| JPH0419794Y2 true JPH0419794Y2 (en]) | 1992-05-06 |
Family
ID=31664540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11625790U Expired JPH0419794Y2 (en]) | 1990-11-07 | 1990-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0419794Y2 (en]) |
-
1990
- 1990-11-07 JP JP11625790U patent/JPH0419794Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0373437U (en]) | 1991-07-24 |
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